Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry

Real time spectroscopic ellipsometry has been applied to develop deposition phase diagrams that can guide the fabrication of hydrogenated silicon (Si: H) thin films at low temperatures (< 300° C) for highest performance electronic devices such as solar cells. The simplest phase diagrams incorporate a single transition from the amorphous growth regime to the mixed-phase (amorphous+ microcrystalline) growth regime versus accumulated film thickness [the a→(a+ μc) transition].

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APA

Pearce, J. (2019). Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry. Afribary. Retrieved from https://tracking.afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry

MLA 8th

Pearce, Joshua "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry" Afribary. Afribary, 22 Apr. 2019, https://tracking.afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry. Accessed 09 Nov. 2024.

MLA7

Pearce, Joshua . "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry". Afribary, Afribary, 22 Apr. 2019. Web. 09 Nov. 2024. < https://tracking.afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry >.

Chicago

Pearce, Joshua . "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry" Afribary (2019). Accessed November 09, 2024. https://tracking.afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry

Document Details
By: Joshua Pearce Field: Material Science Type: Article/Essay 38 PAGES (16033 WORDS) (pdf)