Phase diagrams that characterize plasma-enhanced chemical vapor deposition of Si thin films at low substrate temperature (200 C) have been established using real time spectroscopic ellipsometry as a probe of thin film microstructural evolution and optical properties. These deposition phase diagrams describe the regimes over which predominantly amorphous and microcrystalline Si phases are obtained as a function of the accumulated film thickness and the hydrogen-to-silane gas flow ratio R=[H2]/[SiH4].
Pearce, J. (2019). Stable a-Si: H-Based Multijunction Solar Cells with Guidance from Real-Time Optics. Afribary. Retrieved from https://tracking.afribary.com/works/stable-a-si-h-based-multijunction-solar-cells-with-guidance-from-real-time-optics
Pearce, Joshua "Stable a-Si: H-Based Multijunction Solar Cells with Guidance from Real-Time Optics" Afribary. Afribary, 22 Apr. 2019, https://tracking.afribary.com/works/stable-a-si-h-based-multijunction-solar-cells-with-guidance-from-real-time-optics. Accessed 06 Nov. 2024.
Pearce, Joshua . "Stable a-Si: H-Based Multijunction Solar Cells with Guidance from Real-Time Optics". Afribary, Afribary, 22 Apr. 2019. Web. 06 Nov. 2024. < https://tracking.afribary.com/works/stable-a-si-h-based-multijunction-solar-cells-with-guidance-from-real-time-optics >.
Pearce, Joshua . "Stable a-Si: H-Based Multijunction Solar Cells with Guidance from Real-Time Optics" Afribary (2019). Accessed November 06, 2024. https://tracking.afribary.com/works/stable-a-si-h-based-multijunction-solar-cells-with-guidance-from-real-time-optics